Method for reducing photolithographic steps in a semiconductor interconnect process

ABSTRACT

A semiconductor wafer having a first layer and overlying insulating layer receives a photoresist layer. A first photoresist area is exposed to light having a first dosage, while a second, adjacent photoresist area is concurrently exposed to light having a second dosage. The first area and second area then are concurrently developed to partially expose the photoresist layer. The partial exposure removes photoresist within the first area to one depth and within the second area to a second depth. The second depth differs from the first depth. In one embodiment, the second depth extends through the photoresist down to the insulating layer. After subsequently performing a contact and/or trench etch through the exposed insulating layer and removing excess photoresist above the insulating layer, conductive material is deposited in the contact/trench opening and over the insulating layer. The result is an upper conductive layer coupled to the first layer via a contact or other conductive connection.

CROSS REFERENCE TO RELATED APPLICATION

This application is a continuation of application Ser. No. 08/946,462,filed Oct. 7, 1997, which is a continuation of application Ser. No.08/600,587, filed Feb. 13, 1996, now U.S. Pat. No. 5,741,624, issuedApr. 21, 1998.

BACKGROUND OF THE INVENTION

This invention relates to semiconductor processes for connecting onelayer of a semiconductor wafer to another layer of a semiconductor waferand, more particularly, to a method for reducing the number ofphotolithographic steps in processes connecting one layer of asemiconductor wafer to an upper layer of the semiconductor wafer.

Semiconductor devices, also called integrated circuits, are massproduced by fabricating hundreds of identical circuit patterns on asingle semiconductor wafer. During the process, the wafer is sawed intoidentical dies or "chips." Although commonly referred to assemiconductor devices, the devices are fabricated from variousmaterials, including conductors (e.g., aluminum, tungsten),non-conductors (e.g., silicon dioxide) and semiconductors (e.g.,silicon). Silicon is the most commonly used semiconductor, and is usedin either its single crystal or polycrystalline form. Polycrystallinesilicon is often referred to as polysilicon or simply "poly." Theconductivity of the silicon is adjusted by adding impurities--a processcommonly referred to as "doping."

Within an integrated circuit, thousands of devices (e.g., transistors,diodes) are formed. Typically, contacts are formed where a deviceinterfaces to an area of doped silicon. Specifically, plus typically areformed to connect metal 1 layers with device active regions. Viastypically are formed to connect metal 2 and metal 1 layers. Also,interconnects typically are formed to serve as wiring linesinterconnecting the many devices on the IC and the many regions withinan individual device. These contacts and interconnects are formed usingconductive materials.

The integrated circuit devices with their various conductive layers,semiconductive layers, insulating layers, contacts and interconnects areformed by fabrication processes, including doping processes, depositionprocesses, photolithographic processes, etching processes and otherprocesses. The term "photolithographic process" is of significance here,and refers to a process in which a pattern is delineated in a layer ofmaterial (e.g., photoresist) sensitive to photons, electrons or ions.The principle is similar to that of a photocamera in which an object isimaged on a photo-sensitive emulsion film. While with a photocamera the"final product" is the printed image, the image in the semiconductorprocess context typically is an intermediate pattern which definesregions where material is deposited or removed. The photolithographicprocess typically involves multiple exposing and developing steps,wherein, at a given step, the photoresist is exposed to photons,electrons or ions, then developed to remove one of either the exposed orunexposed portions of photoresist. Complex patterns typically requiremultiple exposure and development steps.

One ongoing goal of semiconductor design and fabrication is to reducecosts. Cost reduction is essential to ongoing success in the field. Onemanner of reducing costs is to eliminate or optimize steps in thesemiconductor fabrication process. In doing so, it is important tomaintain or improve device and process efficiency and effectiveness.

SUMMARY OF THE INVENTION

According to the invention, a reduced number of photolithographic stepsare performed in a semiconductor process for connecting an upperconductive layer to another layer (e.g., conductive layer,semiconductive layer, insulating layer) of a semiconductor wafer. Inparticular, a single exposure step and a single development step isperformed on a resist layer (together one photolithographic step). Inaddition, other steps, although not photolithographic steps, arcperformed to form a connection (e.g., contact, plug, via, interconnect)between the upper conductive layer and the lower layer.

According to one aspect of the invention, a photoresist layer on asemiconductor wafer is partially exposed and developed to removephotoresist down to one depth within a first area and down to a seconddepth within a second area. To do so, the photoresist first area isexposed to light having a first dosage, while the photoresist secondarea is exposed to light having a second dosage. The second dosagediffers from the first dosage. Such first and second areas areconcurrently exposed in the same process step. The first area and secondarea then are concurrently developed to partially expose the photoresistlayer. In particular, the partial exposure removes photoresist withinthe first area to one depth and removes photoresist within the secondarea to a second depth. In one embodiment, the second dosage is greaterthan the first dosage and, correspondingly, the second depth is greaterthan the first depth.

According to another aspect of the invention, a mask having differenttransmissivities at different areas of the mask is used. At areasdirecting light to the first photoresist area, the mask area has onetransmissivity. At areas directing light to the second photoresist area,the mask area has a different transmissivity. The mask transmits lightat the first dosage for exposing the first area and light at the seconddosage for exposing the second area. In one embodiment, the mask is aphase-shifting mask.

According to another aspect of the invention, a semiconductor waferhaving a first layer and an overlying insulating layer receives thelayer of photoresist over the insulating layer. A first area of thephotoresist layer is exposed to light having a first dosage while asecond area adjacent the first area is concurrently exposed to lighthaving a second dosage differing from the first dosage. The first areaand second area of the photoresist layer then are concurrently developedto remove photoresist within the first area to one depth and to removeall photoresist within the second area. The intermediate result is afirst opening in the photoresist layer exposing a portion of theinsulating layer. Thereafter, a second opening is defined by etchingthrough the exposed insulating layer within the first opening.Conductive material then is deposited within the second opening andabove the first layer to form a contact or other conductive connectionbetween the first layer and a deposited second layer. The second layeris a conductive layer above the first layer.

According to another aspect of the invention, the etching step includesetching the exposed insulating layer within the first opening to a firstdepth, and etching through the photoresist remaining in the first areaand an underlying portion of the insulating layer down to a second depthin the insulating layer. The first depth is greater than the seconddepth.

According to another aspect of the invention, the first depth is lessthan the thickness of the insulating layer. Also, the step of etching tothe first depth partially defines the second opening, and furtherincludes, after etching through the remaining photoresist, etching theinsulating layer within the first opening through to the first layer tocomplete defining the second opening.

According to various embodiments, the first layer is one of aconductive, non-conductive or semiconductive layer and the second layeris a conductive layer.

One advantage of the invention is to reduce the number ofphotolithographic steps in a semiconductor fabrication process withoutcompromising device efficiency or effectiveness. These and other aspectsand advantages of the invention will be better understood by referenceto the following detailed description taken in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING

FIG. 1 is a partial cross section of a semiconductor wafer having aconductive region formed according to a method embodiment of thisinvention;

FIG. 2 is a flow chart of a semiconductor process for connecting onelayer to an upper conductive layer via a contact or other conductiveregion according to an embodiment of this invention;

FIG. 3 is a cutaway view of a semiconductor wafer exposed to lightthrough a phase-shifting mask during a photolithographic step accordingto one embodiment of the method of this invention;

FIG. 4 is a cutaway view of the semiconductor wafer of FIG. 3 after aresist development step is performed according to an embodiment of thisinvention;

FIG. 5 is a cutaway view of the semiconductor wafer of FIG. 4 after acontact etching step is performed according to an embodiment of thisinvention;

FIG. 6 is a cutaway view of the semiconductor wafer of FIG. 5 after aphotoresist etching step is performed according to an embodiment of thisinvention;

FIG. 7 is a cutaway view of the semiconductor wafer of FIG. 6 after atrench etching step is performed according to an embodiment of thisinvention;

FIG. 8 is a cutaway view of the semiconductor wafer of FIG. 7 after aresist stripping step and a conductive material deposition step areperformed according to an embodiment of this invention; and

FIG. 9 is a cutaway view of the semiconductor wafer of FIG. 8 after adry etch or CMP step is performed according to an embodiment of thisinvention.

DETAILED DESCRIPTION OF THE INVENTION

Overview

Among the many layers and wiring lines of an integrated circuit formedon a semiconductor wafer, there often is a need to provide a conductiveconnection between a lower layer and an upper layer. Exemplaryconnecting structures include contacts, vias and plugs. FIG. 1 shows apartial cross section of a semiconductor wafer 10. In the portion of thewafer 10 shown, there is a semiconductor substrate 12, a first layer 14,and an insulating layer 16. In addition, there is an upper conductivelayer 18. In the embodiment shown, the upper conductive layer 18 is awiring line. The cross-section illustrated reveals two portions 17, 19of the wiring line 18. Such portions 17, 19 are integrally formed aspart of the same wiring line. A region 20 connects the first layer 14 toa portion 17 of the wiring line 18. In various embodiments, the firstlayer 14 is a conductive region, a conductive layer, a dopedsemiconductor active region or a semiconductive layer. In a specificembodiment, the first layer 14 is an active region of the semiconductorsubstrate 12. In another specific embodiment, the first layer 14 andupper layer 18 are conductive layers and the conductive region 20 is acontact between the layers 14, 18. In alternative embodiments, there areone or more other layers (not shown) between the substrate 12 and firstlayer 14, and one or more other layers (not shown) between the firstlayer 14 and the upper layer 18. The upper layer 18 and conductiveregion 20 are formed with conductive material 21.

This invention is related to an efficient semiconductor process forforming the connection between the first layer 14 and upper conductivelayer 18. In particular, the connection is formed using only onephotolithographic step, or, more specifically, one photolithographicexposure and one photolithographic development. Other steps such asetching, resist stripping, chemical-mechanical polishing (CMP) anddeposition also are performed. A mask 42 (FIG. 3) is used in thephotolithographic step.

Method Embodiment

FIG. 2 shows a flow chart of a semiconductor process 30 for fabricatingan upper conductive layer 18 and a contact or other conductive region 20between a first layer 14 and the upper conductive layer 18. Referring toFIG. 3, a wafer includes a first layer 14 and an insulating layer 16. Atstep 32, a photoresist layer 34 is applied over the insulating layer 16.The photoresist layer 34 covers at least a portion of insulating layer16 in the vicinity of where the conductive region 20 and upper layer 18are eventually to be formed.

With the photoresist layer 34 in place, a photolithographic process isperformed. At step 36 an exposure step is performed, followed by adevelopment step 38. At step 36, a light source emits light 40 of aprescribed wavelength. A typical wavelength is between 248 nm and 436nm, although shorter wavelengths down to 150 nm and longer wavelengthsbeyond 436 nm also are encompassed by this invention. Referring to FIG.3, the light waves 40 travel through a mask 42 which emits light ofdiffering dosage at different regions 56, 58, 60. As a result, light ata first dosage D1 impinges upon one or more first areas 44 of thephotoresist layer 34, while light at a second dosage D2 impinges uponone or more second areas 46 of the photoresist layer 34.

At step 36, the first and second areas 44, 46 are concurrently developedto partially remove photoresist 34. The development step 38 causesphotoresist 34 to be removed down to a first depth 62 within the firstareas 44 and down to a second depth 64 within the second area(s) 46(FIG. 4). Preferably, the dosage D1 does not equal dosage D2. For anembodiment in which the dosage D2>D1, the second depth 64 is greaterthan the first depth 62.

In the embodiment shown in FIG. 4, the second depth 64 is entirelythrough the photoresist layer 34, exposing the underlying insulatinglayer 16. Also in the embodiment (see FIG. 3) shown, there are two firstareas 44 surrounding a second area 46. Once developed, there is anopening 66 at an upper surface 68 of the photoresist layer 34 (see FIG.4). Within the opening 66 there is a narrower opening 70 extendingthrough the photoresist layer 34 down to the insulating layer 16.

Referring to FIGS. 2 and 5, at step 72 a contact etch is performedwithin the opening 70 to etch away the exposed insulating materialwithin opening 70 down to a depth 74. In one embodiment, the etch is toa depth all the way through the insulating layer to the first layer 14.In the embodiment illustrated, the etch is to a depth near the firstlayer 14. For example, for a 10,000 Å insulating layer 16, the etchextends approximately 7000 Å, leaving a thin layer of approximately 3000Å of insulating material remaining.

Referring to FIGS. 2 and 6, at step 80, a resist etch is performed toremove any remaining photoresist within the first opening 66. Thus, anadditional portion of the upper surface 82 of the insulating layer 16 isexposed. At step 84, a trench etch is performed (see FIG. 7) within theopenings 66 and 70 to remove insulating material. Within opening 70,insulating material is etched away down to the first layer 14. Withinthe remaining portion of the opening 66, insulating material is removeddown to a depth 86. Such depth 86 is less than the depth 74 (occurringduring step 72). In the embodiment illustrated, the result is a Topening 88 (when viewed cross-sectionally) in the insulating layer 16.The specific shape of the opening is defined according to the relativegeometry of the first and second areas 44, 46 receiving the differingdosages D1, D2 along with the desired etching geometry through thephotoresist layer 34 and insulating layer 16.

Referring to FIG. 2, at step 89, resist stripping is performed to removeany remaining photoresist 34. Exemplary resist stripping processesinclude dry or wet etching processes.

Referring to FIGS. 2 and 8, at step 90, conductive material 21 isdeposited upon the wafer 10. In particular, the conductive material isdeposited into the opening 88 and upon the surrounding insulating layer16. At step 92, either one of a dry etch or CMP process is performed toremove excess conductive material 21. The dry etch or CMP leaves theconductive material 21 within the opening 88 and removes otherconductive material to generate a smooth surface exposing the insulatinglayer 16 and upper conductive layer 18 (see FIG. 9).

Note that a single photolithographic process (steps 36, 38) is used informing the conductive region 20 and upper layer 18. This is achieved byusing differing dosages of light and developing the exposed regions todifferent depths. Subsequent etching steps then define openings todifferent depths for the conductive region 20 and upper conductive layer18. In contrast, according to a conventional fabrication process, acontact is formed, then an upper conductive layer is formed.Specifically, photoresist is applied, exposed and developed to form anopening in the resist. Then contact etching, resist stripping, metaldeposition and CMP or dry etching are performed to define the contact.Subsequently, photoresist is applied again, exposed and developed toform an opening. Trench etching, resist stripping, metal deposition andCMP or dry etching are performed to define the upper conductive layer.Accordingly, the method of this invention reduces the number ofphotolithographic processes.

Mask

Referring again to FIG. 3, the mask 42 has regions of differenttransmissivity. In one embodiment, the mask is a phase-shifting mask.The mask 42 is formed by a mask plate 48 which is patterned by wellknown methods in the semiconductor art to obtain masking features. Manydifferent masking patterns including lines, rectangles, circles or othergeometric shapes are formed. The mask plate 48 is formed of a materialwhich is generally transparent at a given illuminating frequency. Forexample, a quartz mask plate 48 is transparent to light in the visibleor ultraviolet range. Other materials with a narrower transmissivefrequency range such as soda glass are used in other embodiments.Regions 58 of the mask 42 in which light travels only through the maskplate 48 have a first transmissivity at the light wavelength used in thephotolithographic process.

To define mask regions 56 having a second transmissivity at thephotolithographic process wavelength, a semi-transmissive material layer50 is deposited on desired regions of the mask plate 48. The secondtransmissivity is less than the first transmissivity. Preferably, thesecond transmissivity is 5% to 95% times that of the firsttransmissivity. The relative transmissivity varies depending on thedesired depth differential to be formed in the resist layer 34. Layer 50is formed by depositing a semi-transmissive material onto the mask plate48. An exemplary semi-transmissive material is a chromium-oxide materialavailable through Toppan Printing Co., Ltd. of Tokyo Japan. Othersemi-transmissive materials include molybdenum-oxide, iron oxide,silicon nitride, and aluminum.

The mask 42 also defines regions 60 having a third transmissivity whereresist is not to be exposed. Ideally, such transmissivity is 0% relativeto the first transmissivity. In preferred embodiments, the thirdtransmissivity is 0.1% or less relative to the first transmissivity. Inone embodiment, mask regions 60 are formed by depositing another layer52 of semi-transmissive material onto portions of the layer 50. Suchadditional semi-transmissive material is either the same, althoughpreferably different, than the material deposited to form layer 50. Inan exemplary embodiment, layer 50 is formed by a chromium-oxide basedmaterial (e.g., chrome, oxygen, fluorine and nitrogen elements), whilelayer 52 is formed by a molybdenum-oxide based material (e.g.,molybdenum, silicon oxygen and nitrogen). The specific transmissivitiesof layer 50 and layer 52 are determined by the respective layerthicknesses and layer compositions. Increasing the proportion ofchromium or molybdenum, for example, decreases transmissivity. In analternative embodiment, region 60 is formed by depositing an opaquematerial directly onto the mask plate 48 at the desired regions. In oneembodiment, the opaque material is similar to the semi-transmissivematerial, but includes a higher proportion of chromium, molybdenum oranother transmissivity-decreasing element. The layout and varioustransmissive characteristics of the materials 48, 50, 52 define the maskpattern.

In some embodiments, a phase-shifting material is applied as anadditional layer (not shown). Preferably, however, the layers 50, 52include a material composition for achieving a desired degree ofphase-shifting. An exemplary phase-shifting material is Si₃ N₄, althoughother materials such as oxides or oxynitrides also may be used. Thefunction of the phase-shifting material is to alter the timing or shiftthe waveform of light waves propagating through mask plate 48 andadjacent semi-transmissive material 50. Materials of different thicknessor different indices of refraction serve to shift the phase of the lightwaves. Phase-shifting masks reduce diffraction effects of thepropagating light waves by combining diffracted and phase-shifted light.The degree of phase-shifting preferred, if any, depends on the patternsizes to be formed in the resist.

As the desired pattern decreases, conventional photolithographicprocesses often use 180 degree phase shifting to achieve preciselydefined patterns. Such a phase difference, however, typically results ina small region of very low transmissivity at the boundary on the resistbetween where light of one phase impinges and light of the other phaseimpinges. In applications of this invention where a first resist area 44receiving light at a first dosage is adjacent to a second regionreceiving light at a second dosage, it is undesirable to leave a thinboundary of resist between these adjacent areas 44, 46. Accordingly, itis preferable to use less than 180 degree phase shifting whendeveloping, during one step, adjacent areas of resist to differentdepths. For pattern sizes where light diffraction is not a problem, zerophase-shifting is used. As the pattern size decreases andcorrespondingly the need for phase-shifting increases, the degree ofphase-shifting implemented is increased. For small pattern sizes inwhich light diffraction poses a difficulty, phase-shifting is needed. Insuch instances, the preferred amount of phaseshifting is the highestdegree possible without leaving a thin barrier between adjacent areas44, 46. Such degree varies depending on the desired pattern size, thecoherence of the light impinging on the resist layer 34, and therespective depths of adjacent areas 44, 46, (e.g., depths 62 in FIG. 4).

Meritorious and Advantageous Effects

One advantage of the invention is to reduce the number ofphotolithographic steps in a semiconductor fabrication process withoutcompromising device efficiency or effectiveness. Although a preferredembodiment of the invention has been illustrated and described, variousalternatives, modifications and equivalents may be used. Therefore, theforegoing description should not be taken as limiting the scope of theinventions which are defined by the appended claims.

What is claimed is:
 1. A method of connecting a first layer of asemiconductor device and a second layer of the semiconductor device, thesecond layer at least partially overlapping at least a portion of thefirst layer, comprising:applying photoresist to an insulating layer ofthe semiconductor device disposed adjacent the first layer; exposingphotoresist over a first area of the semiconductor device to a firstdosage of radiation; exposing photoresist over a second area of thesemiconductor device, adjacent the first area, to a second dosage ofradiation; developing said photoresist to concurrently removephotoresist over the first area to a first depth of the photoresist andto remove photoresist over the second area so as to expose theinsulating layer at least partially through the photoresist in thesecond area; removing a region of the insulating layer at the secondarea to expose the first layer through the insulating layer; anddisposing conductive material adjacent a portion of the first layerexposed through the insulating layer.
 2. The method of claim 1, whereinsaid removing further comprisesremoving another region of the insulatinglayer at the first area to a first depth of the insulating layer, whichfirst depth does not extend completely through the insulating layer. 3.The method of claim 2, wherein said removing the region of theinsulating layer and said removing the another region of the insulatinglayer occur simultaneously.
 4. The method of claim 1, wherein saidremoving comprises:removing a region of the insulating layer exposed atthe second area to a second depth of the insulating layer less than athickness of the insulating layer; and removing a region of theinsulating layer at the first and second areas down to a first depth ofthe insulating layer so as to expose the first layer through theinsulating layer at the second area and to reduce the thickness of theinsulating layer at the first area.
 5. The method of claim 1, whereinsaid exposing photoresist over the first area and said exposingphotoresist over the second area occur simultaneously.
 6. The method ofclaim 1, wherein said first dosage differs from said second dosage.
 7. Amethod of fabricating a contact and a conductive layer coupled to afirst layer of a semiconductor device, comprising:applying photoresistonto an insulating layer of the semiconductor device, the insulatinglayer disposed adjacent the first layer; exposing photoresist disposedover a first area of the semiconductor device to a first dosage ofradiation; exposing photoresist disposed over a second area of thesemiconductor device, adjacent the first area, to a second dosage ofradiation; developing said photoresist to concurrently removephotoresist over the first area to a first depth of the photoresist andto remove photoresist over the second area so as to expose a portion ofthe insulating layer through the second area; removing material of theinsulating layer exposed at said second area; and disposing conductivematerial over at least a portion of the semiconductor device and withina region of the insulating layer from which material was removed todefine the contact and the conductive layer.
 8. The method of claim 7,wherein said removing further comprisesremoving material of theinsulating layer at the first area to a first depth of the insulatinglayer, which first depth does not extend completely through theinsulating layer.
 9. The method of claim 8, wherein said removing thematerial of said first and second areas of the insulating layer occurssimultaneously.
 10. The method of claim 7, wherein said exposingphotoresist over the first area and said exposing photoresist over thesecond area occur simultaneously.
 11. The method of claim 7, whereinsaid first dosage differs from said second dosage.
 12. The method ofclaim 7, wherein said removing comprises:removing material of theinsulating layer exposed at the second area to a second depth of theinsulating layer, less than a thickness of the insulating layer, to forman opening in the insulating layer; removing material of the insulatinglayer at the first and second areas to a first depth of the insulatinglayer so as to expose the first layer through the insulating layer atthe second area.
 13. A method of at least partially developingphotoresist, comprising:exposing a first area of the photoresist to afirst dosage of radiation while exposing a second area of thephotoresist to a second dosage of radiation; and developing the firstarea and the second area to remove photoresist within the first area toa first, partial depth of the layer of photoresist and to removephotoresist within the second area to a second depth.
 14. The method ofclaim 13, further comprising disposing a mask having a first region offirst transmissivity and a second region of second transmissivity, andin which the first dosage exits the mask at the first region to exposethe first area, and in which the second dosage exits the mask at thesecond region to expose the second area in order to effect saidexposing.
 15. The method of claim 13, wherein the first area and thesecond area are adjacent.
 16. A method of at least partially developingphotoresist, comprising:irradiating the photoresist through a firstregion of a mask comprising a first transmissivity and through a secondregion of the mask comprising a second transmissivity, wherein a firstdosage of radiation exits the first region of the mask and a seconddosage of radiation exits the second region of the mask substantiallyconcurrently with the first dosage; exposing a first area of the layerof photoresist to the first dosage while exposing a second area of thephotoresist to the second dosage; developing a portion of photoresist inthe first area to a first, partial depth and developing photoresist inthe second area to a second depth.
 17. The method of claim 16, whereinthe first dosage is phase-shifted relative to the second dosage.
 18. Themethod of claim 16, wherein the second depth differs from the first,partial depth.
 19. A method of fabricating an electrically conductivepath between at least two layers of a semiconductor device,comprising:applying photoresist to an insulating layer of thesemiconductor device; exposing a first area of the photoresist to afirst dosage of radiation while exposing a second area of thephotoresist to a second dosage of radiation; developing the first areato open photoresist over the first area to a first, partial depth of thephotoresist and developing the second area to open photoresist over thesecond area so as to expose the insulating layer through the secondarea; removing material of the insulating layer exposed through thesecond area to expose the first area through the insulating layer; anddisposing conductive material in contact with the first area.
 20. Themethod of claim 19, wherein said developing comprises concurrentlydeveloping the first area and the second area.
 21. The method of claim19, wherein the second area is adjacent to the first area.
 22. A methodof interconnecting a wiring line and a conductive area of asemiconductor device, comprising:disposing photoresist on an insulatingregion of the semiconductor device; exposing a first area of thephotoresist to a first dosage of radiation while exposing a second areaof the photoresist, adjacent the first area, to a second dosage ofradiation; developing the first area to open the photoresist over thefirst area to a first, partial depth of the photoresist and developingthe second area; removing a portion of the insulating region exposedthrough the photoresist at the second area to expose the conductive areathrough the insulating region; and disposing a quantity of a conductivematerial in electrical communication with the conductive area to defineat least a portion of the wiring line.
 23. The method of claim 22,wherein said exposing comprises irradiating the first area and thesecond area of the photoresist through a mask having a first regioncomprising a first transmissivity and a second region comprising asecond transmissivity, wherein the first dosage of radiation exits themask from the first region and the second dosage of radiation exits themask from the second region.
 24. The method of claim 23, wherein thefirst dosage of radiation is phase-shifted by less than about 180°relative to the second dosage of radiation.
 25. The method of claim 22,wherein said developing comprises concurrently developing the first areaand the second area.
 26. A method of fabricating a contact incommunication with a doped region of a semiconductor device,comprising:disposing photoresist on an insulating layer of thesemiconductor device; exposing a first area of the photoresist toradiation of a first dosage while exposing a second area to radiation ofa second dosage; developing the first area to open the photoresist overthe first area to a first, partial depth of the photoresist anddeveloping the second area so as to expose the insulating layer throughthe second area; removing a portion of the insulating layer that isexposed through the second area to expose the doped region through theinsulating layer; and disposing conductive material in electricalcommunication with the doped region to form at least a portion of thecontact.
 27. The method of claim 26, wherein said developing comprisessimultaneously developing the first area and the second area.